| 摘要 |
A digital force balanced instrument such as an accelerometer (10) that incorporates a directly digital electrostatic forcer with servo loop plates (14, 16) charged by a digital feedback loop (26, 28, 30, 32, 36, 24 and 26, 28, 30, 32, 34, 22). The accelerometer (10) has a proofmass electrode (12) suspended in a cantilever configuration between electrodes (14, 16) on either side thereof, which proofmass (12) is displaced upon acceleration. Each side electrode (14, 16) includes a plurality of electrostatic plates (40) sized in binarily weighted multiples of area. An induced signal in the proofmass electrode (12) is quantized via an A/D converter (32) in the feedback loop, which activates the appropriate number of plates (14, 16) to force the proofmass (12) to an initial position.
|
