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发明名称
Self-aligned process for manufacturing a gate electrode.
摘要
申请公布号
EP0358042(B1)
申请公布日期
1995.12.06
申请号
EP19890115505
申请日期
1989.08.23
申请人
LICENTIA PATENT-VERWALTUNGS-GMBH;TEMIC TELEFUNKEN MICROELECTRONIC GMBH
发明人
DICKMANN, JUERGEN, DIPL.-ING.
分类号
H01L21/285;H01L21/338;(IPC1-7):H01L21/28
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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