Process for treating acidic exhaust gas.

摘要

This invention relates to a process for treating acidic exhaust gas for separation of its acidic components by contact with a gas-treating solution composed of an aqueous solution of quaternary ammonium compounds, of formula (1): <CHEM> wherein R1 to R4 are each an alkyl group with 1 to 3 carbon atoms or an hydroxyl-substituted alkyl group, said groups being identical with or different from one another, and X is OH<-> or 1/2 CO3<2><->), particularly for treating acidic exhaust gas containing fluorine and/or fluorine compounds easily and efficiently under clean conditions without contaminating the environment and it is suitable for practice in a clean room in the process for manufacturing semi-conductors, particularly suitable for treatment of acidic exhaust gas containing fluorine and/or fluorine compounds generated in the process for manufacturing semiconductors.