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发明名称
摘要
申请公布号
JPH07111526(B2)
申请公布日期
1995.11.29
申请号
JP19880291281
申请日期
1988.11.18
申请人
发明人
分类号
G02F1/313;H01L21/203;(IPC1-7):G02F1/313
主分类号
G02F1/313
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