发明名称 |
Cleaning method and system |
摘要 |
A closed circuit solvent cleaning method and system in which the object to be cleaned is placed in a chamber and subjected to a negative gauge pressure to remove air and other non-condensible gases, after which a solvent is introduced to the evacuated chamber and the object is cleaned. Following this, the solvent is recovered from the object and chamber and then the clean object is removed.
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申请公布号 |
US5469876(A) |
申请公布日期 |
1995.11.28 |
申请号 |
US19930053161 |
申请日期 |
1993.04.26 |
申请人 |
GRAY, DONALD J.;GEBHARD, PETER T. E. |
发明人 |
GRAY, DONALD J.;GEBHARD, PETER T. E. |
分类号 |
B01D5/00;B08B3/04;B08B3/08;B08B7/00;C23G3/00;C23G5/02;C23G5/04;D06F43/00;D06F43/08;(IPC1-7):B08B3/10 |
主分类号 |
B01D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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