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发明名称
HEIGHT MEASURING DEVICE FOR SEMICONDUCTOR PELLET AND ITS MEASURING METHOD
摘要
申请公布号
JPH07311017(A)
申请公布日期
1995.11.28
申请号
JP19940102479
申请日期
1994.05.17
申请人
TOSHIBA CORP
发明人
MIYAHARA UICHI
分类号
G01B11/02;G01R31/26;H01L21/66;(IPC1-7):G01B11/02
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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