| 摘要 |
Gas delivery apparatuses and methods utilize a housing (10) containing three thermal zones (12, 14, 16). Reactant gases (6), vaporized within the first thermal zone (12), travel into successive thermal zones (14, 16), and are heated at a higher temperature to prevent condensation within the line (22). In-line components (24, 28, 30, 32, 42) are mounted to controlled heater plates (23, 62, 82) to heat the in-line components (24, 28, 30, 32, 42) at the temperatures associated with the respective thermal zones. The third thermal zone (16) is heated at a substantially higher temperature than the other thermal zones to prevent adducts within the gas line (22). In one embodiment, the gas line (22) extends into the chamber (8) through a heater block (94) which uniformly heats the line (22) at a temperature higher than the thermal zones (12, 14, 16). In an alternative embodiment, a gas passage (116) is integrally formed within the sidewall (112) and cover (114) of the chamber, which allows the chamber cover (114) to be lifted without mechanically disconnecting a portion of the gas line (22). |
