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发明名称
摘要
申请公布号
JPH07109892(B2)
申请公布日期
1995.11.22
申请号
JP19930156326
申请日期
1993.06.03
申请人
HANDOTAI ENERGY KENKYUSHO
发明人
YAMAZAKI SHUNPEI
分类号
H01L21/205;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/205
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代理人
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