摘要 |
PURPOSE:To obtain a thin-film solar cell of a good series-connection structure by a method wherein the energy of a laser beam reaching the opposite side of a substrate in a laser working operation is set to be lower than a prescribed value. CONSTITUTION:A first electrode layer 4 and a second transparent electrode layer 6 are provided on one face of an insulating substrate 1 so as to sandwich a thin-film semiconductor layer 5 as a photoelectric conversion layer, and the second electrode layer 6 is insulated from the first electrode layer 4 so as to be connected to a third electrode layer 71 on the other face of the substrate 1 by conductors which pass through holes 2, 3 in the substrate 1. Such a unit solar cell is formed in such a way that a laminated body by the first electrode layer 4, by the semiconductor layer 5 and by the second electrode layer 6 and the third electrode layer 71 are removed to be a stripe shape by a laser working operation so as to be divided. Then, the first electrode layer 4 for one unit solar cell is connected to the third electrode layer 7a in an adjacent unit solar cell by means of the conductors 2, 3 passing the through holes 2, 3, and a plurality of unit solar cells are connected in series. In such a manufacturing method, the energy of a laser beam reaching the opposite side of the substrate 1 in the laser working operation is set to be lower than a prescribed value. |