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发明名称
DEVICE AND METHOD FOR NON-CONTACT MEASUREMENT OF THICKNESS OF SEMI-CONDUCTOR
摘要
申请公布号
JPH07306018(A)
申请公布日期
1995.11.21
申请号
JP19940124636
申请日期
1994.05.13
申请人
NIPPONDENSO CO LTD
发明人
OTANI ATSUSHI
分类号
G01B11/06;H01L21/66;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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