Diffraction grating manufacturing method and apparatus.
摘要
<p>A manufacturing method and apparatus for a diffraction grating form the grating by interferentially exposing two divergent beams of light on a photosensitive layer, having a length L. The beams are produced using two spatial filters spaced apart by a distance C and from the photosensitive layer by a distance H. The parameters satisfy the condition H.C/L<2> >/= 32 such that variation in the pattern interval on the photosensitive layer is within 1%. <IMAGE></p>
