| 摘要 |
PURPOSE:To make it possible to input positional coordinate data for accurate inspection by setting a setting reference point based on an image data and CAD data by obtaining the image data by positioning photographing device based on CAD data. CONSTITUTION:Coordinates of alignment point confirms the presence or absence of data from unfilled information by a central processing unit 20 as same as setting data of a carrier portion. Thereafter, the data are read in the central processing unit 20, an XYZ stage 21 is moved to a position where the image of a portion with the coordinates at the center can be taken out by a photographing device 13, focusing treatment is performed and the image is taken in for each alignment point. The image taken in is analyzed by an image processing unit 23, is converted to an image with the characteristics extracted and compared into a characteristics extracted image processed in the same manner from the CAD data, and is stored again in a coordinate data storing unit 35 together with deviation correcting coordinate data. |
