发明名称 |
Electron detector with high backscattered electron acceptance for particle beam apparatus |
摘要 |
An electron detector for use in particle beam apparatus, providing particularly high acceptance of backscattered electrons. The electron detector includes an electron multiplier for detecting electrons and an electrode deployed between the electron multiplier and a specimen. The electrode is biased at a negative potential with respect to the specimen and also with respect to the electron multiplier.
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申请公布号 |
US5466940(A) |
申请公布日期 |
1995.11.14 |
申请号 |
US19940262285 |
申请日期 |
1994.06.20 |
申请人 |
OPAL TECHNOLOGIES LTD. |
发明人 |
LITMAN, ALON;GOLDENSTEIN, ALEXANDER;ROGERS, STEVEN R. |
分类号 |
G01N23/225;G01R19/00;G01T1/29;H01J37/244;H01J37/256;(IPC1-7):H01J37/244 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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