| 摘要 |
PURPOSE: To form an X-ray window durable to a differential pressure equal to or higher than atmospheric pressure and to improve an X-ray transmissivity by forming a diamond film on one surface of a monolithic support rib array and thereby increasing a mechanical strength thereof. CONSTITUTION: A diamond layer is deposited on a substrate material to produce the array of ribs 5, which is a support structure, on a exposed surface of the diamond layer and thereafter the substrate material is removed to obtain the X-ray window in which a circular film 1 on the one surface of the monolithic support rib 5 array of a monolithic structure. The diamond film comprises a flat plane 2 and a plane 3, on which an array of recesses 4 in the shape of a hexagon or in another shape (for example, a rectangle), and the array of ribs 5 are formed among the recesses 4. As a result, since a relatively thin film of about 1μm is formed in a monolithic structure together with the support rib 5 array of about 10μm, a mechanical strength is increased and thus there no need for support of the substrate. A ring portion 6 is left along the periphery of the film 1, which facilitates mounting of the X-ray window. |
