| 摘要 |
PURPOSE:To respond to a desired current command with a simplified circuit structure and reduce distortion of a voltage waveform generated on a load without resulting in cut-off condition of current. CONSTITUTION:An electrostatic actuator driver comprises switching elements Trah to Trc1 for controlling an otuput current, inverse flow preventing diodes D1 to D6 connected in series to the switching elements, a drive circuit Drv and a pulse modulator for supplying a signal thereto. The pulse modulator comprises an apparatus for generating a plurality of carrier signals, code discriminators cp1 to cp3 for discriminating the codes of current command values Ia* to Ic*, comparators cp4 to cp9 for comparing the current command values with carrier signals and a device for selecting an output of the comparator based on outputs of the code discriminators and supplies desired charges to an electrostatic actuatort 23 by generating pulses at intervals corresponding to the current command values. |
