METHOD OF FORMING MINUTE THIN-FILM PATTERN,申请号JP19940114673-传众专利搜索

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发明名称	METHOD OF FORMING MINUTE THIN-FILM PATTERN
摘要
申请公布号	JPH07297170(A)	申请公布日期	1995.11.10
申请号	JP19940114673	申请日期	1994.04.27
申请人	TOKIN CORP	发明人	YAMANAKA EIJI
分类号	C23F1/00;H01L21/306;H01L21/3213;(IPC1-7):H01L21/306;H01L21/321	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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