| 摘要 |
<p>PURPOSE:To detect a position with reference to an absolute coordinate system by storing an image, representative of the features corresponding to a reference mark put on a predetermined position of an aligner, as a reference image and detecting a reference image, including the image corresponding to the reference mark, from an image to be processed. CONSTITUTION:Position of a template image TM1 is detected through pattern matching from a range defined by pattern matching processing ranges iW1, iW2. Origins iO1, iO2 and iO3 of the template images TM1,..., TM3 represent the centers of marks TM11, TM22 and TM33 put on respective images. Since the center of an index mark and the coordinates of positional shift can be determined, the shift of a reference mark FM on a reference mark assembly from the centers of index marks i1,..., i4 on a conjugate index plate can be shown on a stage coordinate system (X, Y).</p> |
