WELDED SUSCEPTOR ASSEMBLY

摘要

A susceptor support arm assembly (30) in a substrate processing chamber includes a secure ground connection between the susceptor (32) and ground. An aluminum wire rope (123) is welded to a winged terminal which is welded to the susceptor hub (94). The wire rope is routed through an opening in the susceptor end of a ceramic susceptor arm (131), through a channel (155) in the susceptor arm to the susceptor arm support device, and to ground. The channel in the susceptor arm has grooves in its sides to receive a paddle-shaped ceramic cover (166) to enclose the channel. The cover insulates, isolates and shields the grounding wire and thermocouple leads. Conical spring washers (186) and shoulder screws (188) attach the metallic pieces (e.g. the susceptor hub) to the ceramic susceptor arm allowing for the differential thermal expansion between pieces without overstressing the ceramic material clamped.