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发明名称
SHEET PLASMA DEVICE
摘要
申请公布号
JPH07296988(A)
申请公布日期
1995.11.10
申请号
JP19940092386
申请日期
1994.04.28
申请人
SUMITOMO HEAVY IND LTD
发明人
SAKAMI TOSHIYUKI
分类号
H05H1/24;C23C14/35;H01L21/302;H01L21/3065;(IPC1-7):H05H1/24
主分类号
H05H1/24
代理机构
代理人
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地址
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