MANUFACTURING METHOD FOR MICRO LENS OF SOLID IMAGE SENSOR

摘要

preparing a charge coupled device having a concave-convex structure, an optical diode being formed in the concave portion and a wire layer being formed in the convex portion; evenly forming a lens forming material capable of expanding in volume on the charge coupled device; and polymerizing or curing the lens forming material having an even upper surface to thereby form a micro lens having an opposite profile to that of the charge coupled device.