| 摘要 |
PURPOSE:To provide a sintering method for obtaining a silicon nitride sintered compact having both the high min. strength and high average strength and excellent in reliability at a low cost. CONSTITUTION:When a compact of sintering aid added silicon nitride powder is sintered, atomospheric sintering is carried out at 1,600-1,800 deg.C in an atmosphere of nitrogen or nitrogen-contg. inert gas in a 1st stage and the resultant sintered compact is held at a temp. below the sintering temp. in an atmosphere under a reduced pressure of <=350Torr in a 2nd stage. |
