发明名称 |
CARTRIDGE EXCIMER LASER SYSTEM |
摘要 |
A new cartridge excimer laser system and method for generating an excimer laser beam using the system are provided. The system utilizes a cartridge (10) which contains a halogen-noble gas mixture (19), electrodes (50, 60) having external electrical connections (30, 40), and assembly (20) for transmitting a laser beam output (400), and an external gas port (90). The cartridge (10) fits onto a receptacle (100) located within a receiving compartment (200) of the laser base (300) of the new system. The cartridge (10) is easily replaced by the system operator and is refurbished by the manufacturer when the gas mixture (19) therein is exhausted.
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申请公布号 |
WO9529523(A1) |
申请公布日期 |
1995.11.02 |
申请号 |
WO1995US04831 |
申请日期 |
1995.04.18 |
申请人 |
AUTONOMOUS TECHNOLOGIES CORPORATION |
发明人 |
FREY, RUDOLPH, W.;BOLEN, PHILIP, D. |
分类号 |
H01S3/03;H01S3/225;(IPC1-7):H01S3/22;H01S3/223 |
主分类号 |
H01S3/03 |
代理机构 |
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代理人 |
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主权项 |
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