发明名称 Differential current thermal mass flow transducer
摘要 The disclosed mass flow transducer is of the type including a balanced bridge comprising two, substantially identical, thermal elements forming two sides of the bridge between the top and the bottom of the bridge, the two elements being adapted to be positioned in two regions of a laminar flow tube in a symmetrical tandem arrangement so as to sense flow through the tube, one element being upstream from the other. The preferred transducer includes control means for monitoring the voltage at the top and bottom of the bridge and monitoring the current required to maintain the node between the thermal elements at virtual ground.
申请公布号 US5461913(A) 申请公布日期 1995.10.31
申请号 US19940264706 申请日期 1994.06.23
申请人 MKS INSTRUMENTS, INC. 发明人 HINKLE, LUKE D.;PROVOST, JAMES
分类号 G01F1/68;G01F1/684;G01F1/696;(IPC1-7):G01F1/68 主分类号 G01F1/68
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