MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19940065952-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH07283214(A)	申请公布日期	1995.10.27
申请号	JP19940065952	申请日期	1994.04.04
申请人	MITSUBISHI ELECTRIC CORP	发明人	YAMAGUCHI SUMIO
分类号	H01L21/285;H01L21/28;H01L21/3205;H01L23/52;(IPC1-7):H01L21/320	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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