| 摘要 |
PURPOSE:To provide a high accurate small-sized acceleration sensor which can detect acceleration in biaxial and triaxial directions simultaneously. CONSTITUTION:The acceleration sensor comprises a wire supporting spring 22 made of a soft magnetic material having magnetostrictive constant being set close to zero, a permanent magnet 21 supported by the spring 22 at the upper end thereof, and field sensors 24a, 25a, 26a disposed on a circle, separated by a predetermined distance from the outer periphery of the permanent magnet 21, at a constant interval of 90 deg. with one ends thereof being set at positions separated by a predetermined distance from the permanent magnet 21. |
