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经营范围
发明名称
CHARGED BEAM LITHOGRAPHY
摘要
申请公布号
JPH07283102(A)
申请公布日期
1995.10.27
申请号
JP19940076095
申请日期
1994.04.14
申请人
TOSHIBA CORP;TOSHIBA MICRO ELECTRON KK
发明人
KOYAMA KIYOMI;SAKAMOTO SHINJI;FUJII TORU
分类号
H01L21/027;G03F7/20;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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