| 摘要 |
PURPOSE:To stably equalize the pressure in each gas line and a pressure container when pressure varies by increasing the amount of gas from a gas supply line according to the increase in pressure inside the pressure container. CONSTITUTION:An anode gas flow control valve 14 and a cathode gas flow control valve 15 are controlled by an anode gas differential pressure controller 16 and a cathode gas differential pressure controller 17 to always control the differential pressure between gas inside a pressure container 12 and an anode gas, and the differential pressure between gas inside the pressure container 12 and a cathode gas to zero. Gas flow control valves 23, 24 are installed in gas supply lines 20, 22. Gas flow controllers 25, 26 for detecting the pressure of gas inside the container 12, and for increasing the amount of gas supplying from the lines 20, 22 according to the increase in pressure detected are arranged. As a result, volume flow rate passing through the control valves 14, 15 is automatically kept almost constant, and stable, accurate differential pressure control can be conducted. |
