| 摘要 |
PURPOSE:To detect the degree of the position shift of a true center of a wafer and a rotary center and correct the coordinates values of a foreign substance data in a surface inspecting apparatus. CONSTITUTION:A position sensor part 8 composed of three optical sensors Sa, Sb, Sc is installed and after an orientation flat of a wafer 1 is positioned in Y-direction, three measuring points in the outer circumference are detected and coordinates values for respective points are obtained and based on these values, position difference (DELTAx, DELTAy) is calculated and the X-Y coordinates values of the foreign data saved in a MEN (memory) 42 are corrected. As a result, at the time of observation of the foreign substance by a SEM(scanning electron microscope), an desired foreign substance can be captured easily. |
