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发明名称
SPUTTERING CONTROLLER
摘要
申请公布号
JPH07278810(A)
申请公布日期
1995.10.24
申请号
JP19940072234
申请日期
1994.04.11
申请人
TOSHIBA CORP
发明人
NISHIJIMA MAMORU
分类号
C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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