摘要 |
PURPOSE:To form a ceramic reinforced membrane consisting of metal nitride, such as zirconium nitride by irradiating a ceramic compact, e.g. consisting essentially of partially stabilized zirconia (PSZ) with laser beams in a nitrogen- contg. atmosphere. CONSTITUTION:A PSZ compact is formed by mixing and sintering tetragonal zirconia and cubic zirconia, in which the tetragonal zirconia is almost uniformly dispersed in a matrix of the cubic zirconia. In this method of production, after water based binder consisting essentially of polyvinyl alcohol is added by 3% to PSZ powder and mixed with distilled water, dehydration is carried out with stirring to obtain a mixture. After it is dried and crushed, it is granulated and compacted by using a metal mold. Further, the compact is pressurized under vacuum at 2000atm for 1min, and heated at 600 deg.C for 2hr, and then heated at 1450 deg.C for 4hr. The surface of the compact to be irradiated by laser beam is polished and irradiated by a YAG laser device or the like. |