Temperature control device and reaction vessel

摘要

A combination is provided of a reaction vessel and apparatus for processing it. Preferably, the latter features a temperature control device comprising two surfaces to contact a reaction vessel sandwiched between them, a heater element being disposed on one side of one of the surfaces, a cavity being provided at the heater element, and pressure means for delivering cooling gas to the cavity and the heater element and for removing the air after it has cooled the heater element. Most preferably, there is further included means for providing relative movement between the control device and a reaction vessel so sandwiched between the two surfaces.