PREPARATION OF EPITAXICIAL THIN FILM OF LITHIUM NNOBIUM

摘要

The epitaxial lithium niobate thin film is prepared by (A) mixing lithium isopropoxide [Li(OCH2(CH3)2 and niobium isopropoxide in molar ratio of 1:1 under nitrogen or argon atmosphere, (B) making a coating solution by resolving the mixture in methanol solution, (C) spin-coating the obtained solution on a sapphire substrate uniformly, (D) drying the coated substrate, and (E) repeating the coating and the drying processes to make a multi-layered thin film. The formed multi-layered thin film is used for an elastic wave device or a optical waveguide device.