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发明名称
DEFECT INSPECTOR
摘要
申请公布号
JPH07270325(A)
申请公布日期
1995.10.20
申请号
JP19940059666
申请日期
1994.03.30
申请人
RICOH CO LTD
发明人
SAKIDA RYUJI
分类号
G01N21/88;G01N21/89;G01N21/93;G01N21/958;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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