| 摘要 |
PURPOSE:To provide an analyzer for ion scattering spectroscopy which can analyze structure of a sample correctly by detecting scattering ions at a plane where an angle of incidence is changed. CONSTITUTION:The apparatus is constituted of ion beams In cast on a sample TP in a given direction, a rotating means 5 for rotating the sample TP so as to set an angle of incidence of the ion beams In, and a rectangular detector 6 for detecting scattering ions Is generated from the sample TP. Tone detector 6 is arranged to detect scattering ions Is at a plane where the angle of incidence of ion beams is changed, with its short side set in parallel to a rotary shaft of the rotating means 5. |
