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发明名称
EXPOSURE DEVICE
摘要
申请公布号
JPH07271052(A)
申请公布日期
1995.10.20
申请号
JP19940085798
申请日期
1994.03.31
申请人
HITACHI ELECTRON ENG CO LTD;USHIO UTEC:KK;MEJIRO PRECISION:KK
发明人
UEHARA MAKOTO;KOIZUMI MITSUYOSHI;MUTO HISASHI;FURUKAWA NOBUYOSHI
分类号
G03F7/20;G03B27/72;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
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