| 摘要 |
PURPOSE:To detect pressure sensing information of a living body or touch information such as a viscous characteristic and its anisotropy and nonlinearity by providing a piezoelectric element in a polarized state of a thin piezoelectric element at least in a region inserted between pattern electrodes and an elastic member adhered to the piezoelectric element at the position inserted between the pattern electrodes. CONSTITUTION:A base 14 of a micro piezoelectric vibrator supports a piezoelectric element 15 at its surrounding and an elastic member 16 is adhered to the piezoelectric element 15. Furthermore, in addition, a rear side protection film 17, a surface protection film 18, and air gaps 19, 20 are provided on a base 14 and the piezoelectric element 15. A side of a module of a pressure sensing and touch sensing sensor mounted on a micro catheter is small. An elastic member 16 with a large mechanical quality coefficient is adhered to a piezoelectric active region 15j of the piezoelectric element 15 so as not to be in contact with the base 14, then the micro piezoelectric vibrator with a very small size and an excellent vibration efficiency is obtained and a pressure sensor with high sensitivity and high S/N is provided. |
