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发明名称
METHOD OF FORMING JUNCTION AND JOINTING METHOD BETWEEN MEMBERS OF TREATMENT APPARATUS
摘要
申请公布号
JPH07273096(A)
申请公布日期
1995.10.20
申请号
JP19940080997
申请日期
1994.03.28
申请人
TOKYO ELECTRON LTD
发明人
AOKI MAKOTO
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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