| 摘要 |
PURPOSE:To execute inspection of a display device with a high resolution and high precision without depending on the precision in positioning and a scale of integration, by a method wherein elements constituting display are made to flicker by different frequencies or phases respectively. CONSTITUTION:A display pattern generating means 30 generates such a pattern as to make display elements flicker with different frequencies respectively and inputs it to a display device 10 to be inspected. A photoelectric conversion means 20 converts the intensity of a light projected from the display device 10 into am electric signal and inputs it to a signal processing device 40. In the processing device 40, the input signal is held in a data storage means. By repeating the storage every time when the display pattern of the display device 10 changes, data showing the intensity of the light changing on a time basis are stored in the storage means. The stored data are subjected to a Fourier analysis on a time base and a power spectrum is determined. The value of the intensity corresponding to a natural flickering frequency of each element is determined on the basis of this power spectrum and transmitted to a determining means 50 and the quality of the display device 10 is determined. |
