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发明名称
FOREIGN MATTER INSPECTOR
摘要
申请公布号
JPH07270326(A)
申请公布日期
1995.10.20
申请号
JP19940084111
申请日期
1994.03.30
申请人
HITACHI ELECTRON ENG CO LTD
发明人
MORISHIGE YOSHIO
分类号
G01N21/88;G01N21/93;G01N21/94;G01N21/956;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
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地址
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