Method and apparatus for dry vapor generation.

摘要

A method and apparatus for dry vapor generation. A manifold assembly with a channel conveys liquid from a liquid source to a vessel (12) secured to the manifold assembly. The vessel includes a fill tube (152) connected to the manifold assembly's channel, and a settling chamber (14) with a vapor outlet and a vapor inlet having a cross-section that is smaller than the vessel's cross-section. A heater (150) heats liquid in the vessel to generate a vapor that enters the settling chamber (14) through its vapor inlet. <IMAGE>