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发明名称
MOLECULAR-BEAM CELL
摘要
申请公布号
JPH07268613(A)
申请公布日期
1995.10.17
申请号
JP19940087961
申请日期
1994.03.31
申请人
EIKO ENG:KK
发明人
TAKAHASHI HIROSHI
分类号
C23C14/26;(IPC1-7):C23C14/26
主分类号
C23C14/26
代理机构
代理人
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