PLASMA TREATMENT DEVICE,申请号JP19940046821-传众专利搜索

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发明名称	PLASMA TREATMENT DEVICE
摘要
申请公布号	JPH07263186(A)	申请公布日期	1995.10.13
申请号	JP19940046821	申请日期	1994.03.17
申请人	HITACHI LTD	发明人	WATANABE SEIICHI;FURUSE MUNEO;SHIRAYONE SHIGERU
分类号	H05H1/46;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H01P7/06;H01Q13/10;(IPC1-7):H05H1/46;H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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