Winkelgeschwindigkeitsmesseinrichtung mit Gasflussfühler.

摘要

A gas flow type angular velocity sensor comprising two semiconductor substrates (1,2) whereon a gas path and a pair of heat wires (51,52) are formed by micromachining is so constructed that its body of high strength may be readily manufactured and easily assembled. The above-mentioned object is achieved in such a way that the first semiconductor substrate (2) with an etched thereon groove (40) constituting a gas path (4) and the second semiconductor substrate (1) with a formed thereon paired heat wires (51,52) are coupled and bonded with each other to form the sensor body.