发明名称 Method of manufacturing planar display using a polyether ether ketone holding container
摘要 PCT No. PCT/JP87/00826 Sec. 371 Date Aug. 12, 1988 Sec. 102(e) Date Aug. 12, 1988 PCT Filed Oct. 27, 1987 PCT Pub. No. WO90/04058 PCT Pub. Date May 5, 1989.A holding container which is made of a polyether ether ketone resin and is suitable for use in holding one or more substrates upon fabrication of the corresponding number of thin-film semiconductor substrates useful in driving a planar display, for example, a liquid crystal display.
申请公布号 US5455201(A) 申请公布日期 1995.10.03
申请号 US19930152260 申请日期 1993.11.12
申请人 MITSUI TOATSU CHEMICALS, INC. 发明人 GOTOH, YOSHIHISA;KAWAMATA, MOTOO;TAKAHASHI, TOSHIAKI
分类号 G02F1/1333;(IPC1-7):H01L21/68;H01L21/48 主分类号 G02F1/1333
代理机构 代理人
主权项
地址