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发明名称
摘要
申请公布号
JPH0789561(B2)
申请公布日期
1995.09.27
申请号
JP19850096161
申请日期
1985.05.08
申请人
发明人
分类号
H01L29/78;H01L21/316;H01L21/76;H01L21/762;H01L29/06;(IPC1-7):H01L21/76
主分类号
H01L29/78
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