Organic chlorides, showing a reduced effect upon the destruction of the ozone layer, for use during silicon thermal oxidation and furnace tube cleaning.
摘要
申请公布号
EP0574809(B1)
申请公布日期
1995.09.27
申请号
EP19930109191
申请日期
1993.06.08
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
LAGENDIJK, ANDRE;HOCHBERG, ARTHUR KENNETH;ROBERTS, DAVID ALLEN
