MANUFACTURE OF SEMICONDUCTOR SUBSTRATE,申请号JP19940042707-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH07249573(A)	申请公布日期	1995.09.26
申请号	JP19940042707	申请日期	1994.03.14
申请人	NIPPON STEEL CORP	发明人	SHIROU AIJI
分类号	H01L21/205;H01L21/20;H01L21/304;(IPC1-7):H01L21/20	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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