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发明名称
PRODUCTION OF SOI BOARD
摘要
申请公布号
JPH07249749(A)
申请公布日期
1995.09.26
申请号
JP19940040964
申请日期
1994.03.11
申请人
CANON INC
发明人
YAMAGATA KENJI;YONEHARA TAKAO
分类号
H01L27/12;H01L21/02;(IPC1-7):H01L27/12
主分类号
H01L27/12
代理机构
代理人
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