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发明名称
ROTARY PROCESSOR
摘要
申请公布号
JPH07249559(A)
申请公布日期
1995.09.26
申请号
JP19940038664
申请日期
1994.03.09
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
SEKIGUCHI KENJI;KONISHI NOBUO
分类号
B05C11/08;H01L21/027;(IPC1-7):H01L21/027
主分类号
B05C11/08
代理机构
代理人
主权项
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