| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
KISHITA. HIROFUMI, KISHITA. HIROFUMI, ANNAKA-SHI, GUNMA-KEN, JP;YAMAGUCHI, KOUICHI, TAKASAKI-SHI, GUNMA-KEN, JP;FUJII, HIDEKI, ANNAKA-SHI, GUNMA-KEN, JP;SUGANUMA, SHUJI, TAKASAKI-SHI, GUNMA-KEN, JP;SAITO, YOSHIKAZU, ANNAKA-SHI, GUNMA-KEN, JP;SATO, SHINICHI, ANNAKA-SHI, GUNMA-KEN, JP;FUKUDA, KENICHI, ANNAKA-SHI, GUNMA-KEN, JP;KOBAYASHI, NOBUYUKI, ANNAKA-SHI, GUNMA-KEN, JP |
